FabStat – Real-Time Monitoring, Prediction and Fault Detection in Semiconductor Manufacturing
Real-time fault detection and classification (FDC). No longer a dream for wafer manufacturing, FDC is becoming mandatory for the successful plant manager who wants to stay competitive. Combining world-class multivariate techniques with semiconductor FDC know-how, Umetrics provides FabStat. From the fab floor to the corner office, FabStat delivers real-time FDC capability and integrates into your existing data collection infrastructure. Everyone responsible for Fab production knows that proper tool monitoring and fault detection is crucial. For multivariate FDC, FabStat is your solution. FabStat is a stand-alone application designed to seamlessly integrate into your existing fab data management system. With FabStat you monitor the entire production line – each tool, wafer by wafer. When a fault occurs, FabStat instantly identifies the out-of-control tool, and points to the leading culprit signals. FabStat reduces your downtime by quickly identifying faults, their cause, and their solution. FabStat is a fully executable stand-alone product with interfaces to the data collection system and the SPC system. FabStat has a built in interface for widely used data collection systems. Its interface is easily modified to integrate with almost all silicon wafer data systems, from the first generation to the latest 300 mm tools. Technology Developed with help from IBM FabStat incorporates technology developed with help from IBM, combining leading technology and experience from silicon fabrication with world leading multivariate analysis from Umetrics. This technology used in IBM factories is vastly extending capabilities of the monitoring systems. The time for diagnosis of equipment faults can be reduced by more than 40%. Ideal for OEM Integration Are you interested in FabStat, but wish to integrate it into your systems as a semiconductor industry software provider? At the heart of FabStat is a highspeed calculation engine called SIMCA-QP+. OEM SIMCA-QP+ inside your software package to provide a client solution enhanced with the latest in multivariate FDC capability. Further Information Please contact Umetrics Sales for further information.		The illustration above indicates how easy it is to monitor several tools simultaneously. FabStat quickly identifies the out-of-control (red) tool and points to the leading culprit signals. DOWNLOADS AND LINKS Brochure Find a FabStat brochure in the Downloads section. SYSTEM REQUIREMENTS • A server class dedicated machine, either centrally located for simultaneous tool connections or distributed per tool installations. • Windows NT 4.0, 2000, or XP. • A data collection or storage and retrieval infrastructure. • A project (.USP-file) created with SIMCA-P+.