FabStat - Real-Time Monitoring, Prediction and Fault Detection in Semiconductor Manufacturing

Combining world-class multivariate techniques with semiconductor FDC know-how, Umetrics provides FabStat. From the fab floor to the corner office, FabStat delivers real-time FDC capability and integrates into your existing data collection infrastructure.

Everyone responsible for Fab production knows that proper tool monitoring and fault detection is crucial. For multivariate FDC, FabStat is your solution.

FabStat is a stand-alone application designed to seamlessly integrate into your existing fab data management system. With FabStat you monitor the entire production line – each tool, wafer by wafer. When a fault occurs, FabStat instantly identifies the out-of-control tool, and points to the leading culprit signals. FabStat reduces your downtime by quickly identifying faults, their cause, and their solution.

FabStat is a fully executable stand-alone product with interfaces to the data collection system and the SPC system. FabStat has a built in interface for widely used data collection systems. Its interface is easily modified to integrate with almost all silicon wafer data systems, from the first generation to the latest 300 mm tools.

The illustration above indicates how easy it is to monitor several tools simultaneously. FabStat quickly identifies the out-of-control (red) tool and points to the leading culprit signals.